Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structures

Stuer, CindyCindyStuerVan Landuyt, J.J.Van LanduytBender, HugoHugoBenderDe Wolf, IngridIngridDe WolfRooyackers, RitaRitaRooyackersBadenes, GonçalGonçalBadenes2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5688Investigation by convergent beam electron diffraction of the stress around shallow trench isolation structuresJournal article