Modelling and extended characterization of sensitive optical micro-machined ultrasound sensors (OMUS) based on a silicon photonic ring resonator on an acoustical membrane

Westerveld, WouterWouterWesterveldLeinders, SuzanneSuzanneLeindersNeer, PaulPaulNeerSnyder, BradBradSnyderUrbach, PaulPaulUrbachde Jong, NicoNicode JongVerweij, MartinMartinVerweijRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochus2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34435Modelling and extended characterization of sensitive optical micro-machined ultrasound sensors (OMUS) based on a silicon photonic ring resonator on an acoustical membraneProceedings paper