Custom table-top anodisation cell for porosification of large silicon wafers

Nabuurs, MariusMariusNabuursMartini, RobertoRobertoMartiniDepauw, ValerieValerieDepauwSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanQian, JunJunQianGordon, IvanIvanGordon2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24296Custom table-top anodisation cell for porosification of large silicon wafersMeeting abstract