Trends in the oxygen enhancement of the ionisation probabilities of elements sputtered from Si

Janssens, TomTomJanssensHuyghebaert, CedricCedricHuyghebaertVandervorst, AlainAlainVandervorst2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6432Trends in the oxygen enhancement of the ionisation probabilities of elements sputtered from SiOral presentation