Bao, JunchengJunchengBaoMarkovic, TomislavTomislavMarkovicBrancato, LuigiLuigiBrancatoKil, DriesDriesKilOcket, IljaIljaOcketPuers, BobBobPuersNauwelaers, BartBartNauwelaers2021-10-282021-10-2820202072-666Xhttps://imec-publications.be/handle/20.500.12860/34696Novel fabrication process for integration of microwave sensors in microfluidic channelsJournal article10.3390/mi11030320