Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensions

Eslava Fernandez, SalvadorSalvadorEslava FernandezBaklanov, MikhaïlMikhaïlBaklanovNeimark, Alex. V.Alex. V.NeimarkIacopi, FrancescaFrancescaIacopiKirschhock, Christine E. A.Christine E. A.KirschhockMaex, KarenKarenMaexMartens, Johan A.Johan A.Martens2021-10-172021-10-1720080935-9648https://imec-publications.be/handle/20.500.12860/13701Evidence of large voids in pure-silica-zeolite low-k dielectrics by spin-on of nanoparticle suspensionsJournal article