Selvaraja, ShankarShankarSelvarajaFernandez, LuisLuisFernandezVanslembrouck, MichaelMichaelVanslembrouckEveraert, Jean-LucJean-LucEveraertDumon, PieterPieterDumonVan Campenhout, JorisJorisVan CampenhoutBogaerts, WimWimBogaertsAbsil, PhilippePhilippeAbsil2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21486Si photonic device uniformity improvement using wafer-scale location specific processingProceedings paper