Non-Linearity of the dissolution in advanced EUV photoresist

Vesters, YannickYannickVestersDe Simone, DaniloDaniloDe Simone2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27548Non-Linearity of the dissolution in advanced EUV photoresistOral presentationhttp://eidec.co.jp/EUVLSymp2016/Oral_PDF_Files/Wed_S3-4.pdf