Veloso, AnabelaAnabelaVelosoCollaert, NadineNadineCollaertDe Keersgieter, AnAnDe KeersgieterWitters, LiesbethLiesbethWittersRooyackers, RitaRitaRooyackersHoffmann, ThomasThomasHoffmannBiesemans, SergeSergeBiesemansJurczak, GosiaGosiaJurczak2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16452Advanced FinFET devices for sub-32nm technology nodes: characteristics and integration challengesMeeting abstract