Vohra, AnuragAnuragVohraKhanam, AfrinaAfrinaKhanamSlotte, JonatanJonatanSlotteMakkonen, IljaIljaMakkonenPourtois, GeoffreyGeoffreyPourtoisLoo, RogerRogerLooVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-272019-010021-8979https://imec-publications.be/handle/20.500.12860/34399Evolution of phosphorus-vacancy clusters in germaniumJournal article10.1063/1.5054996