Monolithic TCAD simulation of phase-change memory (PCM/PRAM) plus Ovonic Threshold Switch (OTS) selector device

Thesberg, M.M.ThesbergStanojevic, Z.Z.StanojevicBaumgartner, O.O.BaumgartnerKernstock, C.C.KernstockLeonelli, D.D.LeonelliBarci, M.M.BarciWang, X.X.WangZhou, X.X.ZhouJiao, H.H.JiaoDonadio, Gabriele LucaGabriele LucaDonadioGarbin, DanieleDanieleGarbinWitters, ThomasThomasWittersKundu, ShreyaShreyaKunduHody, HubertHubertHodyDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKarKarner, M.M.Karner2023-06-302023-01-262023-06-3020230038-1101WOS:000901103400017https://imec-publications.be/handle/20.500.12860/41030Monolithic TCAD simulation of phase-change memory (PCM/PRAM) plus Ovonic Threshold Switch (OTS) selector deviceJournal article10.1016/j.sse.2022.108504WOS:000901103400017SET