Advantages of the FinFET architecture in SONOS and nanocrystal memory devices

Lombardo, S.S.LombardoGerardi, C.C.GerardiBreuil, LaurentLaurentBreuilJahan, C.C.JahanPerniola, L.L.PerniolaCina, G.G.CinaCorso, D.D.CorsoTripiciano, E.E.TripicianoAncarani, V.V.AncaraniIannoccone, G.G.IannocconeBongiorno, C.C.BongiornoGarozzo, C.C.GarozzoBarbera, P.P.BarberaNowak, E.E.NowakPuglisi, R.R.PuglisiCosta, G.A.G.A.CostaCoccorese, C.C.CoccoreseVecchio, M.M.VecchioRimini, E.E.RiminiVan Houdt, JanJanVan HoudtDe Salvo, B.B.De SalvoMelanotte, M.M.Melanotte2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12507Advantages of the FinFET architecture in SONOS and nanocrystal memory devicesProceedings paper