Influence of the nonlinearity introduced by the Casimir force on the harmonic behavior of MEM resonators

Zanaty, MohamedMohamedZanatyJansen, RoelofRoelofJansenAbbas, MohamedMohamedAbbasWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21907Influence of the nonlinearity introduced by the Casimir force on the harmonic behavior of MEM resonatorsMeeting abstract