Kambham, Ajay KumarAjay KumarKambhamZschaetzsch, GerdGerdZschaetzschSasaki, YuichiroYuichiroSasakiTogo, MitsuhiroMitsuhiroTogoHoriguchi, NaotoNaotoHoriguchiMody, J.J.ModyFlorakis, AntoniosAntoniosFlorakisGajula, D.R.D.R.GajulaKumar, ArulArulKumarGilbert, MatthieuMatthieuGilbertVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20899Atom probe tomography for 3D-dopant analysis in FinFET devicesProceedings paper