DeMeulenaere, BartBartDeMeulenaereBienstman, PeterPeterBienstmanDhoedt, BartBartDhoedtBaets, RoelRoelBaets2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3406Detailed study of AlAs-oxidized apertures in VCSEL cavities for optimized modal performanceJournal article