Hoflijk, IlseIlseHoflijkVanleenhove, AnjaAnjaVanleenhoveVaesen, IngeIngeVaesenZborowski, CharlotteCharlotteZborowskiArtyushkova, K.K.ArtyushkovaConard, ThierryThierryConard2023-07-172023-06-202023-07-1720221055-5269WOS:000810621700001https://imec-publications.be/handle/20.500.12860/41832High energy x-ray photoelectron spectroscopy spectra of Si3N4 measured by Cr K alphaJournal article10.1116/6.0001524WOS:000810621700001