Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding

De Witte, HildeHildeDe WitteConard, ThierryThierryConardGouttebaron, R.R.GouttebaronMagnee, R.R.MagneeCaudano, R.R.CaudanoVandervorst, WilfriedWilfriedVandervorstGijbels, ToonToonGijbels2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2510Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen floodingOral presentation