BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure

Fang, YuYuFangLesniewska, AlicjaAlicjaLesniewskaCiofi, IvanIvanCiofiRoussel, PhilippePhilippeRousselWu, ChenChenWuVega Gonzalez, VictorVictorVega GonzalezDe Wolf, IngridIngridDe WolfCroes, KristofKristofCroes2024-12-192024-08-162024-12-192024979-8-3503-6977-91541-7026WOS:001229691100013https://imec-publications.be/handle/20.500.12860/44336BEOL tip-to-tip dielectric reliability characterization using a design-representative test structureProceedings paper10.1109/IRPS48228.2024.10529311979-8-3503-6976-2WOS:001229691100013