Popov, I.I.PopovVan Calster, AndreAndreVan CalsterDe Smet, HerbertHerbertDe SmetBoesman, E.E.BoesmanCallens, F.F.Callens2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/14212D direct X-ray sensor on the base of a-SiN:H thin filmsProceedings paper