Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy

Bekaert, JoostJoostBekaertGronheid, RoelRoelGronheidMKuppuswamy, Vijaya KumarVijaya KumarMKuppuswamyDoise, JanJanDoiseChan, BTBTChanVandenberghe, GeertGeertVandenbergheSayan, SafakSafakSayanCao, YiYiCaoHer, YoungJunYoungJunHer2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23530Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracyOral presentation