Nanoprober based EBIC measurements for nanowire transistor structures

Arstila, KaiKaiArstilaHantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeVandooren, AnneAnneVandoorenVerhulst, AnneAnneVerhulstEyben, PierrePierreEybenVandervorst, WilfriedWilfriedVandervorst2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18494Nanoprober based EBIC measurements for nanowire transistor structuresOral presentation