Optimization of a poly-SiGe MEMS xylophone bar magnetometer based on its equivalent circuit

Rochus, VeroniqueVeroniqueRochusFarghaly, MahmoudMahmoudFarghalyRottenberg, XavierXavierRottenbergTilmans, HarrieHarrieTilmans2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24439Optimization of a poly-SiGe MEMS xylophone bar magnetometer based on its equivalent circuitProceedings paper