Impact of forming gas annealing and firing on the Al2O3/p-Si interface state spectrum

Simoen, EddyEddySimoenRothschild, AudeAudeRothschildVermang, BartBartVermangPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-192021-10-1920111099-0062https://imec-publications.be/handle/20.500.12860/19794Impact of forming gas annealing and firing on the Al2O3/p-Si interface state spectrumJournal article