CMOS-compatible GaN-based devices on 200mm-Si for RF applications: integration and performance

Peralagu, UthayasankaranUthayasankaranPeralaguAlian, AliRezaAliRezaAlianPutcha, VamsiVamsiPutchaKhaled, AhmadAhmadKhaledRodriguez, RaulRaulRodriguezSibaja-Hernandez, ArturoArturoSibaja-HernandezChang, ShaneShaneChangSimoen, EddyEddySimoenZhao, Simeng EllenSimeng EllenZhaoDe Jaeger, BriceBriceDe JaegerFleetwood, Daniel M.Daniel M.FleetwoodWambacq, PietPietWambacqZhao, MingMingZhaoParvais, BertrandBertrandParvaisWaldron, NiamhNiamhWaldronCollaert, NadineNadineCollaert2021-10-272021-10-272019-12https://imec-publications.be/handle/20.500.12860/33772CMOS-compatible GaN-based devices on 200mm-Si for RF applications: integration and performanceProceedings paper