Gate voltage and geometry dependence of the series resistance and of the carrier mobility in FinFET devices

Magnone, PaoloPaoloMagnoneSubramanian, VaidyVaidySubramanianParvais, BertrandBertrandParvaisMercha, AbdelkarimAbdelkarimMerchaPace, CalogeroCalogeroPaceDehan, MorinMorinDehanDecoutere, StefaanStefaanDecoutereGroeseneken, GuidoGuidoGroesenekenCrupi, FeliceFeliceCrupiPierro, SilvioSilvioPierro2021-10-172021-10-1720080167-9317https://imec-publications.be/handle/20.500.12860/14099Gate voltage and geometry dependence of the series resistance and of the carrier mobility in FinFET devicesJournal article