Simoen, EddyEddySimoenClaeys, CorCorClaeysLoo, RogerRogerLooDe Gryse, O.O.De GryseClauws, P.P.ClauwsJob, R.R.JobUlyashin, A.G.A.G.UlyashinFahrner, W.W.Fahrner2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8141Characterisation of oxygen and oxygen-related defects in highly- and lowly-doped siliconJournal article