Wang, LinghuaLinghuaWangLi, YanLuYanLuLiPorcel, Marco GarciaMarco GarciaPorcelVermeulen, DiedrikDiedrikVermeulenHan, XiuyouXiuyouHanWang, LinyanLinyanWangJian, XigaoXigaoJianZhao, MingshanMingshanZhaoMorthier, GeertGeertMorthier2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21833Grating couplers in polymer with a thin Si3N4 layer embeddedProceedings paper