Vermang, BartBartVermangGoverde, HansHansGoverdeTous, LoicLoicTousLorenz, AnneAnneLorenzChoulat, PatrickPatrickChoulatHorzel, JörgJörgHorzelJohn, JoachimJoachimJohnPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-202021-10-2020121062-7995https://imec-publications.be/handle/20.500.12860/21789Approach for Al2O3 rear surface passivation of industrial p-type Si PERC above 19%Journal article