Pawlak, MalgorzataMalgorzataPawlakKaczer, BenBenKaczerKim, Min-SooMin-SooKimPopovici, Mihaela IoanaMihaela IoanaPopoviciTomida, KazuyukiKazuyukiTomidaSwerts, JohanJohanSwertsOpsomer, KarlKarlOpsomerPolspoel, WouterWouterPolspoelFavia, PaolaPaolaFaviaVrancken, ChristaChristaVranckenDemeurisse, CarolineCarolineDemeurisseWang, W.-C.W.-C.WangAfanasiev, ValeriValeriAfanasievVandervorst, WilfriedWilfriedVandervorstBender, HugoHugoBenderDebusschere, IngridIngridDebusschereAltimime, LaithLaithAltimimeKittl, JorgeJorgeKittl2021-10-182021-10-1820100003-6951https://imec-publications.be/handle/20.500.12860/17783Impact of crystallization behavior of SrxTiyOz films on electrical properties of metal-insulator-metal capacitors with TiN electrodesJournal article