Sangameswaran, SandeepSandeepSangameswaranThijs, StevenStevenThijsScholz, MirkoMirkoScholzDe Coster, JeroenJeroenDe CosterLinten, DimitriDimitriLintenGroeseneken, GuidoGuidoGroesenekenDe Wolf, IngridIngridDe Wolf2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19725A silicon-controlled rectifier-based ESD protection for MEMS – Merits and challengesProceedings paper