Two-dimensional profiling of InP structures using scanning spreading resistance microscopy

De Wolf, PeterPeterDe WolfGeva, M.M.GevaHantschel, ThomasThomasHantschelVandervorst, WilfriedWilfriedVandervorstBylsma, R. B.R. B.Bylsma2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2518Two-dimensional profiling of InP structures using scanning spreading resistance microscopyJournal article