Strain in PFETs analyzed by nano beam diffraction

Favia, PaolaPaolaFaviaEneman, GeertGeertEnemanYamaguchi, ShinpeiShinpeiYamaguchiOrtolland, ClaudeClaudeOrtollandHoffmann, Thomas Y.Thomas Y.HoffmannRichard, OlivierOlivierRichardBender, HugoHugoBender2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17096Strain in PFETs analyzed by nano beam diffractionProceedings paper