P+/N junction leakage in thin selectively grown germanium-in-STI substrates

Eneman, GeertGeertEnemanYang, RuiRuiYangWang, GangGangWangDe Jaeger, BriceBriceDe JaegerLoo, RogerRogerLooClaeys, CorCorClaeysMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsSimoen, EddyEddySimoen2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15278P+/N junction leakage in thin selectively grown germanium-in-STI substratesOral presentation