Polycrystalline silicon as waveguide material for advanced photonic applications

Selvaraja, ShankarShankarSelvarajaSchaekers, MarcMarcSchaekersBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-05https://imec-publications.be/handle/20.500.12860/12876Polycrystalline silicon as waveguide material for advanced photonic applicationsProceedings paper