Demonstration of a cost effective Cu electroless TSV metallization scheme

Vandersmissen, KevinKevinVandersmissenInoue, FumihiroFumihiroInoueVelenis, DimitriosDimitriosVelenisLi, YunlongYunlongLiDictus, DriesDriesDictusFrees, BartBartFreesVan Huylenbroeck, StefaanStefaanVan HuylenbroeckKondo, M.M.KondoSeino, T.T.SeinoHeylen, NancyNancyHeylenStruyf, HerbertHerbertStruyfvan der Veen, MarleenMarleenvan der Veen2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26099Demonstration of a cost effective Cu electroless TSV metallization schemeProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325618