van der Veen, MarleenMarleenvan der VeenBarbarin, YohanYohanBarbarinVereecke, BartBartVereeckeMasahito, SugiuraSugiuraMasahitoKashiwagi, YusakiYusakiKashiwagiCott, DaireDaireCottHuyghebaert, CedricCedricHuyghebaertTokei, ZsoltZsoltTokei2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23243Electrical improvement of CNT contacts with Cu damascene top metallizationProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6615601&contentType=Conference+Publications