Montal, OfirOfirMontalDolev, IdoIdoDolevRosenzweig, MosheMosheRosenzweigDotan, KfirKfirDotanMeshulach, DoronDoronMeshulachAdan, OferOferAdanLevi, ShimonShimonLeviCai, Man-PingMan-PingCaiBencher, ChrisChrisBencherNgai, Christopher S.Christopher S.NgaiJehoul, ChristianeChristianeJehoulVan Den Heuvel, DieterDieterVan Den HeuvelHendrickx, EricEricHendrickx2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19451Characterization of EUV resists for defectivity at 32nmProceedings paper