Interconnects for scaled SRAM with vertical Surrounded Gate Transistors (SGT)

Boemmels, JuergenJuergenBoemmelsHarada, N.N.HaradaKim, Min-SooMin-SooKimMitard, JeromeJeromeMitardKikuchi, YoshiakiYoshiakiKikuchiLi, WaikinWaikinLiTao, ZhengZhengTaoPuliyalil, HarinarayananHarinarayananPuliyalilDevriendt, KatiaKatiaDevriendtLorant, ChristopheChristopheLorantLe, Quoc ToanQuoc ToanLeKesters, ElsElsKestersJourdan, NicolasNicolasJourdanEl-Mekki, ZaidZaidEl-MekkiTeugels, LieveLieveTeugelsvan der Veen, MarleenMarleenvan der VeenLi, Y.Y.LiNakamura, H.H.NakamuraMocuta, DanDanMocutaMasuoka, F.F.Masuoka2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32575Interconnects for scaled SRAM with vertical Surrounded Gate Transistors (SGT)Proceedings paperhttps://iitc-conference.org/2019-iitc-mam-program/