Characterization of B-doped ultra-nanocrystalline diamond films grown by plasma enhanced CVD under a continuous DC bias

Janssen, W.W.JanssenRuttens, B.B.RuttensDegutis, G.G.DegutisLu, Y.G.Y.G.LuTurner, S.S.TurnerVerbeeck, J.J.VerbeeckVan Tendeloo, G.G.Van TendelooVan Bael, MarliesMarliesVan BaelHardy, AnAnHardyHaenen, KenKenHaenen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20863Characterization of B-doped ultra-nanocrystalline diamond films grown by plasma enhanced CVD under a continuous DC biasOral presentation