Si1-xGex selective etchant for gate-all-around transistors

Harada, KenKenHaradaSuzuki, TatsunobuTatsunobuSuzukiKusano, TomohiroTomohiroKusanoTakeshita, KanKanTakeshitaOniki, YusukeYusukeOnikiAltamirano Sanchez, EfrainEfrainAltamirano SanchezStruyf, HerbertHerbertStruyfHolsteyns, FrankFrankHolsteyns2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36758Si1-xGex selective etchant for gate-all-around transistorsProceedings paperhttps://doi.org/10.4028/www.scientific.net/SSP.314.71