Determination of optical constants of thin films in the EUV

Ciesielski, RichardRichardCiesielskiSaadeh, QaisQaisSaadehPhilipsen, VickyVickyPhilipsenOpsomer, KarlKarlOpsomerSoulie, Jean-PhilippeJean-PhilippeSoulieWu, MeiyiMeiyiWuNaujok, PhilippPhilippNaujokvan de Kruijs, Robbert W. E.Robbert W. E.van de KruijsDetavernier, ChristopheChristopheDetavernierKolbe, MichaelMichaelKolbeScholze, FrankFrankScholzeSoltwisch, VictorVictorSoltwisch2022-04-052022-03-262022-03-282022-04-0520221559-128XWOS:000767047200031https://imec-publications.be/handle/20.500.12860/39535Determination of optical constants of thin films in the EUVJournal article10.1364/AO.447152WOS:000767047200031SOFT-X-RAYEXTREME-ULTRAVIOLETMULTILAYER MIRRORSTOTAL-REFLECTIONSCATTERINGSURFACEATTENUATIONMOLYBDENUMABSORPTIONTABULATIONMEDLINE:35297898