Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin films

Opsomer, KarlKarlOpsomerSchaekers, MarcMarcSchaekersRampelberg, G.G.RampelbergDeduytsche, D.D.DeduytscheDetavernier, C.C.DetavernierKittl, JorgeJorgeKittl2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15948Atomic layer deposition of ZrO2, TiO2, and ZrTiO4 thin filmsMeeting abstract