Extremely small fabrication tolerant InP-based power-splitting and combining structures by deep etching

Spiekman, L. H.L. H.SpiekmanOei, Y. S.Y. S.OeiMetaal, E. G.E. G.MetaalGroen, F. H.F. H.GroenMoerman, IngridIngridMoermanSmit, M. K.M. K.SmitVerbeek, B. H.B. H.Verbeek2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/366Extremely small fabrication tolerant InP-based power-splitting and combining structures by deep etchingProceedings paper