A DLTS study of SiO2 and SiO2/SiNx bi-layer surface passivation of silicon

Simoen, EddyEddySimoenGong, ChunChunGongPosthuma, NielsNielsPosthumaVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17990A DLTS study of SiO2 and SiO2/SiNx bi-layer surface passivation of siliconMeeting abstract