Development of ALD HfZrOx with TDEAH, TDEAZ and H2O

Shi, XiaopingXiaopingShiTielens, HildeHildeTielensTakeoka, ShinjiShinjiTakeokaNakabayashi, TakashiTakashiNakabayashiNyns, LauraLauraNynsAdelmann, ChristophChristophAdelmannDelabie, AnneliesAnneliesDelabieSchram, TomTomSchramRagnarsson, Lars-AkeLars-AkeRagnarssonSchaekers, MarcMarcSchaekersDate, LucienLucienDateSchreutelkamp, RobRobSchreutelkampVan Elshocht, SvenSvenVan Elshocht2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17976Development of ALD HfZrOx with TDEAH, TDEAZ and H2OProceedings paperhttp://www.ecsdl.org/dbt/dbt.jsp?KEY=ECSTF8&Volume=27&Issue=1#MAJOR6