Barozzi, MarioMarioBarozziIacob, EricaEricaIacobvan den Berg, Jaap A.Jaap A.van den BergReading, Michael A.Michael A.ReadingAdelmann, ChristophChristophAdelmannPopovici, Mihaela IoanaMihaela IoanaPopoviciTielens, HildeHildeTielensBersani, MassimoMassimoBersani2021-10-212021-10-2120130142-2421https://imec-publications.be/handle/20.500.12860/22019TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFMJournal article