Billen, MargoMargoBillenFerrer, EloiEloiFerrerPandian, Mohan S.Mohan S.PandianRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochus2022-06-292022-05-072022-06-2920221084-6999WOS:000784358100063https://imec-publications.be/handle/20.500.12860/39762MID-AIR HAPTIC FEEDBACK ENABLED BY ALUMINUM NITRIDE PMUTSProceedings paper978-1-6654-0911-7WOS:000784358100063TACTILE