Investigation of the Si doping effect in b-Ga2O3 films by co-sputtering of gallium oxide and Si

Takakura, K.K.TakakuraFunasaki, S.S.FunasakiTsunoda, I.I.TsunodaOhyama, H.H.OhyamaTakeuchi, D.D.TakeuchiNakashima, T.T.NakashimaShibuya, M.M.ShibuyaMurakami, K.K.MurakamiSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-202021-10-2020120921-4526https://imec-publications.be/handle/20.500.12860/21581Investigation of the Si doping effect in b-Ga2O3 films by co-sputtering of gallium oxide and SiJournal article