Santos, S.D.S.D.SantosNicoletti, T.T.NicolettiAoulaiche, MarcMarcAoulaicheMartino, J.A.J.A.MartinoVeloso, AnabelaAnabelaVelosoJurczak, GosiaGosiaJurczakSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21457Spacer length and tilt implantation influence on scaled UTBOX FD MOSFETsProceedings paper