Microstructure simulation of grain growth in Cu through silicon vias using phase-field modeling

Nabiollahi, NabiNabiNabiollahiMoelans, NeleNeleMoelansGonzalez, MarioMarioGonzalezDe Messemaeker, JokeJokeDe MessemaekerWilson, ChrisChrisWilsonCroes, KristofKristofCroesBeyne, EricEricBeyneDe Wolf, IngridIngridDe Wolf2021-10-222021-10-2220150026-2714https://imec-publications.be/handle/20.500.12860/25679Microstructure simulation of grain growth in Cu through silicon vias using phase-field modelingJournal articlehttp://www.sciencedirect.com/science/article/pii/S0026271415000293